U22 Series Regulators
U22 Series Regulators
GENTEC U22 Series Regulators are purge gas, pressure reducing applicable to gas system of any non-corrosive, corrosive, or toxic gases with medium duty of gas flow. The large valve minimizes fluctuation and also acts as a reliable shut-off feature in low pressure.Features316L stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male, and the internal 1/4" face seal female is also available
Full internal electropolish
Cleaned, assembled and packaged for ultra high purity semiconductor applications
High cycle life
100% Helium leak tested
Materials of Construction* WettedBody - 316L stainless steelSeat - PCTFE, VespelDiaphragm - 316L stainless steel, HastelloyPoppet - 316 stainless steel, HastelloyRemaining Part - 316 stainless steel, Hastelloy* Non-wettedNut - 316 stainless steelCap - Nickel plated brassKnob - ABS PlasticOperating ConditionsMaximum inlet pressure - 500 psig (35 barg), 3000 psig (206 barg)Outlet pressure - 0-25 psig (1.7 barg), 0-50 psig (3 barg), 0-100 psig (7 barg), 0-125 psig (9 barg), 0-250 psig (17 barg)Temperature - -40F to 165F (-40C to 74C)Functional PerformanceFlow Capacity - Cv=1.1Designed Leak Rate:Inboard Leakage - 2 x 10-8 atm cc/sec HeOutboard Leakage - 2 x 10-9 atm cc/sec HeLeakage across seat - 4 x 10-8 atm cc/sec HeDesigned Proof Pressure - 150% of maximum rated pressureDesigned Burst Pressure - 400% of maximum rated pressureSurface FinishStandard Ra - 20uin. (Assembled, bagged, and sealed in cleanroom.)Optional Ra (EP) - 10uin. (Assembled, double bagged, and sealed in class 10 cleanroom.)Internal Volume22.6 cc
