U23 Series Regulators
U23 Series Regulators
GENTEC U23 series regulators are idea purge regulators for low pressure and high purity systems, especially for heavy duty of gas flow applications. The large valve minimizes fluctuation and also acts as a reliable shut-off feature in low pressure.Features316L stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male, and the internal 1/4" face seal female is also available
Full internal electropolish
Cleaned, assembled and packaged for ultra high purity semiconductor applications
High cycle life
100% Helium leak tested
Materials of Construction*WettedBody - 316L stainless steelSeat - PCTFE, VespelDiaphragm - 316L stainless steel, HastelloyPoppet - 316 stainless steel, HastelloyRemaining Part - 316 stainless steel, Hastelloy*Non-wettedNut - 316 stainless steelCap - Nicket plated brassKnob - ABS PlasticOperating ConditionsMaximum Inlet pressure - 500 psig (35 barg), 3000 psig (206 barg)Outlet pressure - 0-25 psig (1.7 barg), 0-50 psig (3 barg), 0-100 psig (7 barg), 0-125 psig (9 barg), 0-250 psig (17 barg)Temperature - -40F to 165F (-40C to 74C)Functional PerformanceFlow Capacity - Cv-1.8Designed Leak Rate:Inboard Leakage - 2 x 10-8 atm cc/sec HeOutboard Leakage - 2 x 10-9 atm cc/sec HeLeakage across seat - 4 x 10-8 atm cc/sec HeDesigned Proof Pressure - 150% of maximum rated pressureDesigned Burst Pressure - 400% of maximum rated pressureSurface FinishStandard Ra - 20uin. (Assembled, bagged, and sealed in cleanroom.)Optional Ra (EP) - 10uin. (Assembled, double bagged, and sealed in class 10 cleanroom.)Internal Volume59.5 cc
