U53 Series Regulators

GENTEC U53 series regulators are threadless, high purity, non-tied diaphragm regulator. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.Features316L and Hastelloy body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male and the internal 1/4" face seal female is also available
Internally threadless nozzle assembly
Standard full internal electropolish
Design for very low particle generation
Cleaned, assembled and packaged for ultra high purity semiconductor applications
High cycle life
100% Helium leak tested


Materials of Construction*WettedBody - 316L stainless steel, HastelloySeat - PCTFEDiaphragm - Elgiloy, HastelloyPoppet - 316L stainless steel, HastelloyCompression Member - 316L stainless steel, HastelloyRemaining Part - 316L stainless steel, Hastelloy*Non-wettedNut - 316 stainless steelCap - 316 stainless steelKnob - ABS PlasticOperating ConditionsMaximum inlet pressure - 300 psig (20 barg)Outlet pressure - 0-30 psig (2 barg)Temperature - 0F to 140F (-18C to 60C)Functional PerformanceFlow Capacity - Cv=0.054Designed Leak Rate:Inboard Leakage - 0.5 x 10-9 atm cc/sec HeOutboard Leakage - 1.0 x 10-9 atm cc/sec HeLeakage across seat - 1.0 x 10-9 atm cc/sec HeDesigned Proof Pressure - 450 psig (31 barg)Designed Burst Pressure - 1200 psig (83 barg)Surface FinishStandard Ra (EP) - 10uin (Assembled, double bagged, and sealed in class 10 cleanroom)Internal Volume9.3 cc

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