U57 Series Regulators
U57 Series Regulators
GENTEC U57 series regulators are springless, threadless, point-of-use tied diaphragm regulators for modern semiconductor manufacturers, equipment manufacturers and end users. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.Features316L and Hastelly body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male, and the internal 1/4" face seal female is also available
No springs or threads are exposed to the wetted area
Standard full internal electropolish
Design for very low particle generation
Cleaned, assembled and packaged for ultra high purity semiconductor applications
High cycle life
100% Helium leak tested
Materials of Construction*WettedBody - 316L stainless steel, HastelloySeat - PCTFEDiaphragm - Elgiloy, HastelloyPoppet - 316L stainless, HastelloyCompression Member - 316L stainless HastelloyRemaining Part - 316L stainless steel, Hastelloy*Non-wettedNut - 316 stainless steelCap - 316 stainless steelKnob - ABS PlasticOperating ConditionsMaximum inlet pressure - 300 psig (20 barg)Outlet pressure - 0-30 psig (2 barg)Temperature - 0F to 140F (-18C to 60C)Functional PerformanceFlow Capacity - Cv=0.054Designed Leak Rate:Inboard Leakage - 0.5 x 10-9 atm cc/sec HeOutboard Leakage - 1.0 x 10-9 atm cc/sec HeLeakage across seat - 1.0 x 10-9 atm cc/sec HeDesigned Proof Pressure - 450 psig (31 barg)Designed Burst Pressure - 1200 psig (83 barg)Surface FinishStandard Ra (EP) - 10uin (Assembled, bagged, and sealed in cleanroom)Optional Ra (EP) - 5uin (Assembled, double bagged, and sealed in class 10 cleanroom.)Internal Volume9.3 cc
